Search
Search
#1. 什麼是靜電吸盤What is Electrostatic Chuck? - 龍欣科技股 ...
WELCOME TO 龍欣科技股份有限公司 EDRAGON TECHNOLOGY CORPORATION · “靜電吸盤”為最原始論文標示electrostatic,因而延續稱呼“靜電”吸盤。 · “靜電“吸盤有許多種類和製造商 ...
#2. 靜電吸盤產品資訊
Electrostatic Chuck. 瑞耘科技設計與製造的陶瓷靜電吸盤產品,可應用於真空系統中保持半導體和非導體(矽晶圓、玻璃)基板的吸附。我們亦將靜電吸盤應用延伸至自動化 ...
#3. 電漿製程環境中雙極性靜電吸盤的量測與開發| NTU Scholars
雙極性靜電吸盤(Electrostatic Chuck,ESC)已經在一系列的電漿製程環境中被研發使用,它的優勢是在於它不需加入電漿即可以有吸附能力,所以在業界逐漸廣泛運用。
#4. Electrostatic chuck | Application | Matsusada Precision
An electrostatic chuck (E-Chuck, ESC) is a chuck that absorbs and fixes (chucks) a workpiece by using an electrical force that causes objects to attract ...
#5. Electrostatic Chucks - Entegris
Leveraging proprietary coating technologies and innovative manufacturing capabilities, our electrostatic chucks offer a very flat clamped wafer surface, ...
#6. Electrostatic chucks | Products | NGK INSULATORS, LTD.
These electrostatic chucks are designed to chuck the silicon wafer and keep it flat, allowing the wafer to uniformly dissipate the heat received from the ...
#7. (PDF) Modeling of Electrostatic Chuck and Simulation of ...
Electrostatic chuck (ESC) is one of the key components in IC manufacturing process, which applies the principle of electrostatic adsorption to clamp the ...
#8. Ceramic Electrostatic Chuck | Services | SHINKO ...
SHINKO designs ceramic electrostatic chucks which are widely used for semiconductor wafer processing such as etching and CVD equipment.
#9. Electrostatic Chuck | TOMOEGAWA
The electrostatic chuck applies a voltage to the electrode provided inside, and fixes the object to be adsorbed by Coulomb force (electrostatic force).
#10. Principles of Electrostatic Chucks - 1 - Electrogrip
These processes include lithography, ion implantation, plasma etch, film deposition, and inspection. Electrostatic chuck performance is controlled by both the ...
#11. The Electrostatic Semiconductor Wafer Clamping/Chucking ...
The electrostatic chuck (ESC) is used in a variety of semiconductor processes to hold the wafer during processing. ESCs employ a platen with integral ...
#12. Electrostatic Chuck | SUMITOMO OSAKA CEMENT Co.,Ltd.
Fine ceramic products of semiconductor equipment. Electrostatic Chuck. Features. ・Enable to apply for wide range of temperature. (Room temperature to 200 ...
#13. Design space of electrostatic chuck in etching chamber
摘要: One of the core semiconductor devices is the electrostatic chuck. It has been widely used in plasma-based and vacuum-based semiconductor processing.
#14. Detachable electrostatic chuck for supporting a substrate in a ...
A substrate support has an electrostatic chuck comprising an electrostatic puck with a dielectric covering an electrode capable of being charged to energize ...
#15. Design space of electrostatic chuck in etching chamber
One of the core semiconductor devices is the electrostatic chuck. It has been widely used in plasma-based and vacuum-based semiconductor processing.
#16. What is Electrostatic Chuck (ESC)? - クリエイティブ ...
Electrostatic chuck (ESC) is a specialized type of clamp used to hold down or pick up objects by electrical force, by attraction forces from static electricity.
#17. Patent Coulomb-Force E-Chuck (Electrostatic Chuck) for Thin ...
#18. Electrostatic chuck with a thin ceramic insulation layer for ...
An electrostatic chuck is one of the useful device holding a thin object flat on a bed by electrostatic force. The authors have investigated the fundamental ...
#19. Electrostatic Chucks (ESCs) | Fine Ceramics (Advanced ...
Highly plasma-resistant chucks perform well in a wide range of operating temperatures. An internal electrode is embedded to utilize the electrostatic force ...
#20. 多物理仿真應用於靜電吸盤之晶圓熱傳分析
靜電吸盤 ; 晶圓溫度 ; 熱傳遞路徑 ; 氮化鋁 ; 氧化鋁 ; Electrostatic Chuck (ESC, E-Chuck) ; Wafer temperature ; Heat transfer path ; Aluminium Nitride ...
#21. Modeling of Electrostatic Chuck and Simulation ... - Scientific.Net
Electrostatic chuck (ESC) is one of the key components in IC manufacturing process, which applies the principle of electrostatic adsorption to clamp the ...
#22. Wafer dependence of Johnsen–Rahbek type electrostatic ...
由 S Qin 著作 · 2007 · 被引用 32 次 — Electrostatic chucks (ESCs) are widely utilized in plasma- and vacuum-based semiconductor processes—including etching, chemical vapor deposition, and ion ...
#23. Electrostatic chuck and method of manufacturing the same
An electrostatic chuck includes an ESC electrode E 1 that is disc-shaped in plan view, an ESC electrode E 2 that is doughnut-shaped in plan view, ...
#24. Low-thermal expansion electrostatic chuck materials and ...
Low-thermal expansion electrostatic chuck materials have been evaluated for use in the EUVL α-tool of ASML because of the requirements for overlay and ...
#25. Global Market Study on Electrostatic Chucks (ESC)
The electrostatic chucks (ESC) market has witnessed substantial growth in recent years, and is projected to expand at a CAGR of 5.5% over the next ten ...
#26. NTK Ceratec - Electrostatic Chuck - DKSH Product
Electrostatic chucks and ceramic heaters can be produced by sintering materials with metallic electrodes arranged in the ceramics.
#27. About electrostatic chucks/Tsukuba Seiko Co., Ltd. - 筑波 ...
An electrostatic chuck is a tool that achieves adsorption through Coulomb force generated between the work (object for machining) and electrodes to which a ...
#28. 博碩士論文行動網
詳目顯示 ; Li, Lien-Chieh · 除電參數分析及實驗設計於晶圓蝕刻後之偏移量改善研究 · Analysis and Study of Electrostatic Chuck (ESC) For Etched Wafer Shift Improvement.
#29. electrostatic chuck - Chinese translation – Linguee
Many translated example sentences containing "electrostatic chuck" – Chinese-English dictionary and search engine for Chinese translations.
#30. Electrostatic Chucks | Ceramics | TOTO
TOTO's electrostatic chucks (ESCs) contribute to state-of-the-art semiconductor manufacturing processes by achieving superior durability and low backside ...
#31. WO/2020/153449 ELECTROSTATIC CHUCK - WIPO ...
This electrostatic chuck is provided with: an insulation substrate (1) having a sample holding surface; and a support body (2) joined to the ...
#32. Electrostatic chucks for lithography applications
Abstract High precision electrostatic chucks with diameters up to 12 inches are being developed at IOF for electron/ion-beam lithography applications.
#33. Method and apparatus for determining wafer warpage for ...
Method and apparatus are provided for determining a warpage of a wafer (14) for providing a minimum clamping voltage to an electrostatic chuck (ESC) when ...
#34. Electrostatic chuck for high temperature rf applications - Google
An electrostatic chuck includes a puck having a support surface to support a substrate when disposed thereon and an opposing second surface, wherein one or ...
#35. US20090284894A1 - Electrostatic chuck - Google Patents
In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising an electrode, and a surface layer activated by a ...
#36. 靜電吸盤_百度百科
Electrostatic Chuck. 別名. 靜電卡盤. 外文簡稱. ESC或E-CHUCK. 快速導航. 原理; 功能配置; 產品特色; 運用領域. 產品介紹. 靜電卡盤所使用的靜電吸附技術是一種替代 ...
#37. Dechuck Operation of Coulomb Type and Johnsen ... - J-Stage
Comparative study on Coulomb type and Johnsen-Rahbek type of electrostatic chuck used for holding a silicon wafer in plasma processing is presented.
#38. Electrostatic Chuck Pedestals - Technetics Group
Electrostatic Chuck Pedestals. High-performance pedestal solutions ... Technetics Semi has manufactured PVD Electro-Static Chucks (ESCs) for over 10 years.
#39. Electrostatic Chuck | Krosaki Harima Corporation ...
Electrostatic Chuck. In semiconductor production vacuum processes, electrostatic chucks are used to secure, carry and correct components such as wafers and ...
#40. Chuck Design | ASML in Berlin
Customer-specific vacuum chucks and electrostatic chucks (ESCs) for the semiconductor industries - by Berliner Glas - from prototypes to volume production.
#41. Electrostatic Chuck (ESC) - Autech Technology
Trek amplifiers (e.g. Trek 645, Trek 646) are used to apply AC and DC voltages to the electrode(s) of coloumbic or Johnsen-Rahbek electrostatic chucks...
#42. Investigations into an electrostatic chuck design for 450mm Si ...
We report on theoretical and experimental investigations into electrostatic chuck designs for use in future e-beam lithography on 450 mm ...
#43. Development of a bipolar electrostatic chuck module with a be..
In this paper, we propose a successful fabrication method for a bipolar electrostatic chuck (ESC) device with a beam-array assembly, in order to achieve a ...
#44. electrostatic chuck 中文- 靜電夾… - 查查在線詞典
electrostatic chuck 中文:靜電夾盤…,點擊查查權威綫上辭典詳細解釋electrostatic chuck的中文翻譯,electrostatic chuck的發音,音標,用法和例句等。
#45. 中興大學機構典藏NCHU Institutional Repository
標題: Using the Taguchi Method Experimental Analysis of Electrostatic Chuck(ESC) from Wafer Process to Improve the Offset Parameter Optimization Study
#46. Electrostatic Chuck-CALITECH CO.,LTD.
Electrostatic Chuck. Category: Key Components. Exhibitor: CALITECH CO.,LTD. Booth No: P806. Characteristic. Calitech built E-Chuck according to ...
#47. Electrostatic chuck for EUV masks | Microelectronic Engineering
... for electrostatic clamping devices. At Fraunhofer IOF technology analysis has started to identify suitable manufacturing processes for EUV mask chucks ...
#48. Micromachined Silicon Electrostatic Chuck - UNT Digital Library
Current electrostatic chucks that operate by the {open_quotes}Johnson-Rahbek Effect{close_quotes} consist of a metallic base plate that is ...
#49. Electrostatic chuck - MyScienceWork
An electrostatic chuck comprises an insulating layer with an electrode embedded therein and having a surface to come in contact with a workpiece to be held.
#50. E-Chuck - Spellman High Voltage
An electrostatic chuck consists of a platen with surface electrodes which are biased with high voltage to set up an electrostatic force between the platen ...
#51. Method of determining a dechucking voltage which nullifies a ...
When using an electrostatic chuck to hold a wafer in a plasma reactor chamber, one of the difficulties to overcome is that the wafer adheres or 'sticks' to the.
#52. electrostatic chuck - Translation into French - examples English
Translations in context of "electrostatic chuck" in English-French from Reverso Context: An electrostatic chuck configured for high temperature reduced- ...
#53. On-Wafer Temperature Monitoring Sensor for Condition ...
Abstract: The temperature of electrostatic chuck (ESC), a wafer susceptor used in semiconductor etch equipment, must accurately control the ...
#54. Prediction of residual clamping force for Coulomb type and ...
Electrostatic chucks are being widely used in semiconductor manufacturing equipment. In particular, an electrostatic chuck is an ...
#55. 慶康科技股份有限公司_產品與技術
這個頁面上的內容需要較新版本的Adobe Flash Player。 ; Electrostatic Chuck(ESC) ; ‧材質:, 鋁材、氧化鋁、氧化釔 ; ‧尺寸:, 300mm ; ‧說明:, 可供應Etch設備使用之E- ...
#56. Electrostatic chuck with a thin ceramic ... - Semantic Scholar
An electrostatic chuck is one of the useful device holding a thin object flat on a bed by electrostatic force. The authors have investigated ...
#57. CHUCKING PRESSURES FOR IDEALIZED COULOMB-TYPE ...
Coulomb-type electrostatic chucks are considered to be a key- ... analysis on a Coulomb-type electrostatic chuck as opposed to a Johnsen-.
#58. Electrostatic chuck (ESC) & heater refurbishment
This is introduction of refurbishment services of Electrostatic Chuck (E-Chuck/ESC) and heaters for CVD and PVD equipment. We can offer these refurbishment ...
#59. High temperature polymide electrostatic chuck - Patent 0725426
[0002] Electrostatic chucks are devices which have gained wide usage in the semiconductor field for clamping semiconductor wafers during ...
#60. Global Electrostatic Chucks Market is Expected to Reach USD
Electrostatic Chucks Market by Type (Coulomb-Fore Electrostatic Chuck, Johnsen-Rahbek Electrostatic Chuck), Application, Regions, ...
#61. Electrostatic chuck | NTK CERATEC CO., LTD.
Electrostatic chucks and ceramic heaters can be produced by sintering materials with metallic electrodes arranged in the ceramics.
#62. Global Electrostatic Chucks Market is Expected to Reach USD ...
Electrostatic Chucks Market by Type (Coulomb-Fore Electrostatic Chuck, Johnsen-Rahbek Electrostatic Chuck), Application, Regions, ...
#63. Temperature Analysis of Electrostatic Chuck for Cryogenic ...
As the size of semiconductor devices decreases, the etching pattern becomes very narrow and a deep high aspect ratio process becomes important.
#64. Physical modeling and characteristics of a Johnsen-Rahbek ...
Generally, a Johnsen-Rahbek (J-R) type electrostatic chuck (ESC) generates higher attractive force than a Coulomb type ESC. Attractive force in a J-R type ...
#65. Electrostatic Chucks - Semiconductor Online
Electrostatic Chucks. Source: AJA International. Electrostatic Chucks. The Semco electrostatic chuck pulls with a uniform force across the entire wafer.
#66. US 9025305 B2 - High surface resistivity electrostatic chuck
An electrostatic chuck comprising: an electrode; and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically ...
#67. Spellman announces the new MSC2.5PN7.5 for electrostatic ...
... of the MSC2.5PN7.5, a bipolar reversible power supply specifically designed for electrostatic chuck (ESC) clamping applications.
#68. Electrogrip CHKHTIbot3 Electrostatic Chuck, 600g Force at +
Electrogrip CHKHTIbot3 Electrostatic Chuck, 600g Force at +/- 2kV, 9"x13": Amazon.com: Industrial & Scientific.
#69. 瀚軒股份有限公司- Hypersonic Inc Company - IC封裝- ProTec
Electrostatic Chuck Systems enlarged our business area. We intensify our collaboration with partners in the field of processing and handling thin substrates ...
#70. Electrostatic Chuck - Automation Taipei 2021
Electrostatic Chuck. Category: Key Components ... Calitech built E-Chuck according to customers' requirements to address material handling issues.
#71. Electrostatic Chucks Market - Forecast(2022 - IndustryARC
Electrostatic Chucks Market Size, Share, Trends and industry analysis now available from IndustryARC. Report reveals Electrostatic Chucks Market in the ...
#72. 晶圓載具-無線靜電吸盤-台灣經貿網 - Taiwantrade
示範影片Patent Coulomb-Force E-Chuck (Electrostatic Chuck) for Thin Fragile Materials and Vacuum Environments https://youtu.be/FVvNLzzwZSE ...
#73. Hitachi Electrostatic Chuck M-712E Used Working | eBay
Hitachi M-712E Electrostatic Chuck used working. This Hitachi M-712E Electrostatic Chuck is used working surplus. These products are subject to export ...
#74. Dechuck Operation of Coulomb Type and Johnsen-Rahbek ...
In many plasma process applications, electrostatic chuck (ESC) is used as a standard industrial tool for tightly chucking the object (silicon wafer) on a stage ...
#75. Characterization of electrostatic chucks for extreme ultraviolet ...
The use of an electrostatic chuck to support and flatten an extreme ultraviolet (EUV) mask during scanning exposure will be a critical component to meet the ...
#76. Model 645 | Trek Inc | Electrostatic Chuck Supply | Acal BFi BE
Buy Model 645, Electrostatic Chuck Supply or other Chuck power supply products from Acal BFi BE. Get a quote from Europe's leading industrial electronics ...
#77. De-clamping wafers from an electrostatic chuck - Justia Patents
For quite some time, electrostatic chucks have been utilized in plasma-based or vacuum-based semiconductor processes such as etching, CVD, and ...
#78. Global Electrostatic Chuck Power Supply Market 2022 ...
The Global Electrostatic Chuck Power Supply Market area is expected to increment fundamentally somewhere in the range of 2022 and 2028, ...
#79. Chuck Cleaning Wafer - International Test Solutions
ITS CCW可增加前段晶圓廠設備的可用性。在過程中工具已被清潔,無需離線取出工具。CCW 可以被多次使用。 Contamination on a wafer chuck.
#80. Bringing Existing Tools to a New Level of Performance
Ceramic electrostatic chuck. Figure 1 shows the etch rate and uniformity for an Al etch process. In addition to the etch rate and uniformity being matched to ...
#81. Chuck Cleaning Wafers - MGN International
ESC(Electrostatic Chuck) Applications. Etch and PVD chambers have scheduled wet cleans with extended tool downtime. · Vacuum Chuck Applications · Etch Application ...
#82. Oxides—Advances in Research and Application: 2013 Edition: ...
apparatus which is able to prevent the insulation breakdown between the electrostatic chuck section and the temperature adjusting base section, ...
#83. Plasma Etching Processes for Sub-quarter Micron Devices: ...
BIPOLAR ELECTROSTATIC CHUCKS S. Kanno and T. Usui Mechanical Erfgineering ... of a bipolar electrostatic chuck ( ESC ) which has electrical independent dual ...
#84. hau_presentation.pdf
Overview of Electrostatic Chucks (ESCs) ii. Why is Multiphysics? ... and the chuck is required to remove large amounts of heat from the wafer while.
#85. Semiconductor Electrostatic Chuck Market 2022 Size, Scope ...
13 小時前 — This Global Semiconductor Electrostatic Chuck Market Research Report Forecast 2022-2027 is a valuable source of insightful data for business ...
#86. 靜電吸盤 - TYQQ
靜電吸盤的優勢靜電吸盤的優勢Advantages of Electrostatic Chuck 可於真空環境下產生吸力無微粒產生高平坦度吸附力量均勻可控制溫度可用於多孔材料自從2011年成功生產 ...
#87. ESC (Electrostatic Chuck) - 블로그 - 네이버
ESC (Electrostatic Chuck) ... Clamping이란 Process 진행 중 Wafer back side면에 Gas 압력이 유지되는 동안 wafer top side의 표면을 기계적으로 누르고 ...
#88. 固定&吸附元件(Chuck)簡介
固定&吸附元件(Chuck)簡介 ... 有些使用環境無法使用氣體,例如在真空腔體中,靜電吸盤(Electrostatic Chuck,ESC) 就是用來解決這種問題,基本上的 ...
#89. Aluminum Compounds—Advances in Research and Application: ...
“Electrostatic chucks have been used for holding wafers in semiconductor manufacturing equipment. Such an electrostatic chuck includes an internal electrode ...
#90. Lanthanoid Series Elements—Advances in Research and ...
(4) The electrostatic chuck according to any of the above items (1) to (3), wherein the crystal structure of the composite oxide sintered body is a crystal ...
#91. ESC Division - HS INC.
The electrostatic chuck is a device for generating an attracting force between an electrode and an object at a voltage applied to the electrode.
#92. About Us-Wafer chuck,Electrostatic Chucks,Porous Ceramic
Our wafer chuck tables, Electrostatic Chucks and heaters are virtually found in many Semiconductor equipment in most of the process from front to end.
#93. Semiconductor Electrostatic Chuck Market Growth Analysis by ...
TOP KEY PLAYERS of Semiconductor Electrostatic Chuck Market Report are: SHINKO; TOTO; Creative Technology Corporation; Kyocera; FM Industries ...
#94. 靜電吸盤原理 - Optimt
靜電力吸附式晶圓乘載盤模組(Electrostatic Chuck,簡稱ESC或靜電力吸盤)。ESC原理是藉由施加超過1500伏的高電壓於電極承載板上產生靜電力,而使電極承載板和晶圓間 ...
#95. Global Semiconductor Electrostatic Chuck Market 2022 Share ...
Global Semiconductor Electrostatic Chuck Market 2022 Share, Growth Forecast and Industry Outlook 2028. ByAngelina. Mar 24, 2022. MRInsights.biz provides a ...
electrostatic chuck 在 Patent Coulomb-Force E-Chuck (Electrostatic Chuck) for Thin ... 的推薦與評價
... <看更多>